A high performance MEMS based digital-output gyroscope

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dc.AffiliationOctober University for modern sciences and Arts (MSA)
dc.contributor.authorIsmail, A
dc.contributor.authorGeorge, B
dc.contributor.authorElmallah, A
dc.contributor.authorMokhtar, A
dc.contributor.authorAbdelazim, M.
dc.contributor.authorElmala, M
dc.contributor.authorElshennawy, A
dc.contributor.authorOmar, A
dc.contributor.authorSaeed, M
dc.contributor.authorMostafa, I
dc.contributor.authorElsayed, A
dc.date.accessioned2020-03-07T08:38:22Z
dc.date.available2020-03-07T08:38:22Z
dc.date.issued2013
dc.descriptionMSA Google Scholaren_US
dc.description.abstractIn this work, the architecture, and measurements results of an ultra-low noise closed-loop force feedback gyroscope, with superior bias instability, are presented. The MEMS is interfaced to a highly programmable capacitive interface ASIC, constructing a complete sensor module with a digital-output. Measurements results indicate the superior performance of the gyroscope, with a bias instability of 1°/hr, a noise floor of 1.3m/s/√Hz, and a full-scale range of ±300°/s, while consuming 25mA from a 5V supply.en_US
dc.identifier.citation1. M. Lemkin, B. Boser, "A Three- Axis Micromachined Accelerometer with a CMOS Position-Sense Interface and Digital Offset- Trim Electronics", IEEE J. Solid-State Circuits, vol. 34, no. 4, pp. 456-468, Apr. 1999. Show Context View Article Full Text: PDF (563KB) Google Scholar 2. V. P. Petkov, B. Boser, "A Fourth-order Σ-Δ Interface for Micromachined Intertial sensors", IEEE J. Solid-State Circuits, vol. 40, no. 8, pp. 1602-1609, Aug. 2005. Show Context View Article Full Text: PDF (680KB) Google Scholar 3. X. Jiang, J. Seeger, M. Kraft, B. Boser, "A Monolithic Surface Micromachined Z-Axis Gyroscope with Digital Output", Dig. Symp. VLSI Circuits, pp. 16-19, June 2000. Show Context Google Scholar 4. A. Elsayed, A. Elshennawy, A. Elmallah, A. Shaban, B. George, M. Elmala, A. Ismail, A. Wassal, M. Sakr, A. Mokhtar, M. Hafez, A. Hamed, M. Saeed, M. Samir, M. Hammad, M. Elkhouly, A. Kamal, M. Rabieah, A. Elghufaili, S. Shaibani, I. Hakami, T. Alanazi, "A Self-Clocked ASIC Interface for MEMS Gyroscope with 1m°√Hz Noise Floor", Proc. IEEE Custom Integrated Circuits Conf. Dig. Tech. Papers, 2011. Show Context Google Scholar 5. V. P. Petkov, B. Boser, "High-order Electromichanical Σ-Δ Modulation in Micromachined Intertial sensors", IEEE Trans. Circuits Syst. I, vol. 53, no. 5, pp. 1016-1022, May 2006. Show Context View Article Full Text: PDF (517KB) Google Scholar 6. J. Raman, P. Rombouts, L. Weyten, "An Unconstrained Architecture for Systematic Design of Higher Order Σ-Δ Force Feedback Loops", IEEE Trans. Circuits Syst. I, vol. 55, no. 6, pp. 1601-1614, July 2008. Show Context View Article Full Text: PDF (1306KB) Google Scholaren_US
dc.identifier.doihttps://doi.org/10.1109/Transducers.2013.6627319
dc.identifier.issnElectronic ISSN: 2164-1641
dc.identifier.issnPrint ISSN: 2159-547X
dc.identifier.otherhttps://doi.org/10.1109/Transducers.2013.6627319
dc.identifier.urihttps://t.ly/b91VZ
dc.language.isoenen_US
dc.publisherIEEEen_US
dc.relation.ispartofseriesINSPEC Accession Number: 13838319;
dc.subjectGyroscopesen_US
dc.subjectinertial sensorsen_US
dc.subjectClosed-loop sensorsen_US
dc.subjectforce-feedbacken_US
dc.subjectelectro-mechanical Σ-Δen_US
dc.titleA high performance MEMS based digital-output gyroscopeen_US
dc.typeOtheren_US

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