A high performance MEMS based digital-output gyroscope
Date
2013
Journal Title
Journal ISSN
Volume Title
Type
Other
Publisher
IEEE
Series Info
INSPEC Accession Number: 13838319;
Scientific Journal Rankings
Abstract
In this work, the architecture, and measurements results of an ultra-low noise closed-loop force feedback gyroscope, with superior bias instability, are presented. The MEMS is interfaced to a highly programmable capacitive interface ASIC, constructing a complete sensor module with a digital-output. Measurements results indicate the superior performance of the gyroscope, with a bias instability of 1°/hr, a noise floor of 1.3m/s/√Hz, and a full-scale range of ±300°/s, while consuming 25mA from a 5V supply.
Description
MSA Google Scholar
Keywords
Gyroscopes, inertial sensors, Closed-loop sensors, force-feedback, electro-mechanical Σ-Δ
Citation
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