Electronic interface system with 7.5/12.5V actuation for MEMS accelerometer

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dc.AffiliationOctober University for modern sciences and Arts (MSA)
dc.contributor.authorElmala, MA
dc.contributor.authorOmar, A
dc.contributor.authorMetawea, A
dc.contributor.authorIsmail, A
dc.contributor.authorElmallah, AS
dc.contributor.authorSaeed, AI
dc.contributor.authorElsayed, A
dc.contributor.authorBensaleh, MS
dc.contributor.authorObeid, AM
dc.contributor.authorAlghofaili, A
dc.contributor.authorAlzahem, I
dc.contributor.authorAlshaibani, S
dc.contributor.authorAlnahdi, M
dc.contributor.authorAljehani, N
dc.contributor.authorBhybha, A
dc.contributor.authorQasim, SM
dc.date.accessioned2020-03-09T07:13:23Z
dc.date.available2020-03-09T07:13:23Z
dc.date.issued2017
dc.descriptionMSA Google Scholaren_US
dc.description.abstractAn electronic interface system for MEMS accelerometer is implemented in 0.18μm HVCMOS technology. The ASIC uses 7.5/12.5V to increase the net actuation force and increases the input acceleration range. The measured ASIC sensitivity is 35fF/g. Maximum measured error is 0.38% of full scale, for 0 to 5g input acceleration. This ASIC interface includes on-chip reference generation, decimation, and temperature compensation.en_US
dc.identifier.citation1. B. V. Amini et al., "A 2.5-V 14-bit ΔΣ CMOS SOI Capacitive Accelerometer", IEEE J. Solid-State Circuits, vol. 39, no. 12, pp. 2467-2476, Dec. 2004. Show Context View Article Full Text: PDF (1874KB) Google Scholar 2. B. V. Amini et al., "A 4.5-mW Closed-Loop ΔΣ Micro-Gravity CMOS SOI Accelerometer", IEEE J. Solid-State Circuits, vol. 41, no. 12, pp. 2983-2991, Dec. 2006. Show Context Google Scholar 3. A. Ismail et al., "A High Performance MEMS Based Digital-Output Gyroscope", Proc. Int. Conf. Solid-State Sensors Actuators and Microsystems, June 2013. Show Context Google Scholar 4. M. Ker et al., "Design of Charge Pump Circuit with Consideration of Gate-Oxide Reliability in Low-Voltage CMOS Process", IEEE J. Solid-State Circuits, vol. 41, no. 5, pp. 1100-1106, May 2006. Show Context View Article Full Text: PDF (1089KB) Google Scholar 5. A. Elsayed et al., "A Self-Clocked ASIC Interface for MEMS Gyroscope with 1 m°s/✓Hz Noise Floor", Proc. IEEE Custom Integrated Circuits Conf., Sept. 2011. Show Context Google Scholar 6. A. Omar et al., "A New Versatile Hardware Platform for Closed-Loop Gyro Evaluation", IEEE Inertial Sensors and Systems Symposium, pp. 1-14, Sept. 2015. Show Context Google Scholaren_US
dc.identifier.isbnElectronic ISBN: 978-1-5386-6407-0
dc.identifier.isbnPrint on Demand(PoD) ISBN: 978-1-5386-1878-3
dc.identifier.urihttps://t.ly/V2DD6
dc.language.isoenen_US
dc.publisherIEEEen_US
dc.relation.ispartofseriesntl Conf on Advanced Control Circuits Systems (ACCS) Systems & 2017 Intl Conf on New Paradigms in Electronics & Information Technology (PEIT);2017
dc.subjectMicromechanical devicesen_US
dc.subjectAccelerometersen_US
dc.subjectRobot sensing systemsen_US
dc.subjectTemperature sensorsen_US
dc.subjectTemperature measurementen_US
dc.subjectAccelerationen_US
dc.titleElectronic interface system with 7.5/12.5V actuation for MEMS accelerometeren_US
dc.typeOtheren_US

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