Electronic interface system with 7.5/12.5V actuation for MEMS accelerometer
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Date
2017
Journal Title
Journal ISSN
Volume Title
Type
Other
Publisher
IEEE
Series Info
ntl Conf on Advanced Control Circuits Systems (ACCS) Systems & 2017 Intl Conf on New Paradigms in Electronics & Information Technology (PEIT);2017
Doi
Scientific Journal Rankings
Abstract
An electronic interface system for MEMS accelerometer is implemented in 0.18μm HVCMOS technology. The ASIC uses 7.5/12.5V to increase the net actuation force and increases the input acceleration range. The measured ASIC sensitivity is 35fF/g. Maximum measured error is 0.38% of full scale, for 0 to 5g input acceleration. This ASIC interface includes on-chip reference generation, decimation, and temperature compensation.
Description
MSA Google Scholar
Keywords
Micromechanical devices, Accelerometers, Robot sensing systems, Temperature sensors, Temperature measurement, Acceleration
Citation
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