A new versatile hardware platform for closed-loop gyro evaluation
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Date
2015
Journal Title
Journal ISSN
Volume Title
Type
Other
Publisher
IEEE
Series Info
DGON Inertial Sensors and Systems Symposium (ISS);2015
Doi
Scientific Journal Rankings
Abstract
In this work, a fast and cost-efficient method, to evaluate MEMS gyroscope, in a closed-loop sense-mode operation (force-feedback), is introduced. The solution proposed in this paper introduces a complete platform for developing MEMS-based closed-loop inertial sensor that is highly competitive in terms of performance and that can significantly reduce the development cost and the time-to-market. The platform comprises a high-performance highly-programmable digital capacitive ASIC used to interface to the MEMS sensor, along with hardware for digital processing. The platform is also associated with a software program to configure the ASIC settings according to the MEMS parameters, in order to achieve the desired dynamic range, bandwidth and noise performance. Sensor manufacturers can utilize this tool to quickly asses their sensors in the development phase. Furthermore, the ASIC associated with the platform can be used for rapid prototyping, or building a final sensor product.
Description
MSA Google Scholar
Keywords
Application specific integrated circuits, Micromechanical devices, Digital filters, Capacitance, Resonant frequency
Citation
1. A. Ismail, B. George, A. Elmallah, A. Mokhtar, M. Abdelazim, M. Elmala, A. Elshennawy, A. Omar, M. Saeed, I. Mostafa, A. Elsayed, "A high performance MEMS based digital-output gyroscope", in Proc. 17th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers), 2013. Show Context Google Scholar 2. A. Elsayed, A. Elamllah, A. Elshennawy, A. Shaban, B. George, M. Elmala, A. Ismail, M. Sakr, A. Mokhtar, "Interface for MEMS Inertial Sensors", US patent number US, Aug. 13 2013. Show Context Google Scholar 3. A. Elsayed, A. Elshennawy, A. Elmallah, A. Shaban, B. George, M. Elmala, A. Ismail, A. Wassal, M. Sakr, A. Mokhtar, M. Hafez, A. Hamed, M. Saeed, M. Samir, M. Hammad, M. Elkhouly, A. Kamal, M. Rabieah, A. Elghufaili, S. Shaibani, I. Hakami, T. Alanazi, "A Self-Clocked ASIC Interface for MEMS Gyroscope with 1m°/s/✓Hz Noise Floor", in Proc. IEEE Custom Integrated Circuits Conf. Dig. Tech. Papers, 2011. Show Context Google Scholar 4. A. Ismail, A. Elshennawy, A. Mokhtar, A. Elsayed, "Electronic compensation of capacitive micro-machined sensors parasitic modes in force-feedback interface systems", US patent number US, Oct. 28 2014. Show Context Google Scholar