A self-clocked ASIC interface for MEMS gyroscope with 1m°/s/√Hz noise floor
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Date
2011
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Volume Title
Type
Other
Publisher
IEEE
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Doi
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Abstract
An interface for MEMS gyroscope is implemented in 0.18μm HVCMOS technology, and achieves a low noise floor of 1m°/sec/√Hz over 200Hz BW. Electromechanical ΣΔ force-feedback and self-clocking scheme based on gyro resonance are implemented. The interface includes on-chip reference generation, decimation, and temperature compensation.
Description
MSA Google Scholar
Keywords
gyroscopes, Sigma delta modulation, Force feedback, Self-clocking, MEMS, Coriolis force
Citation
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