Electronic interface system with 7.5/12.5V actuation for MEMS accelerometer

Elmala, MA; Omar, A; Metawea, A; Ismail, A; Elmallah, AS; Saeed, AI; Elsayed, A; Bensaleh, MS; Obeid, AM; Alghofaili, A; Alzahem, I; Alshaibani, S; Alnahdi, M; Aljehani, N; Bhybha, A; Qasim, SM

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Electronic interface system with 7.5/12.5V actuation for MEMS accelerometer

Elmala, MA; Omar, A; Metawea, A; Ismail, A; Elmallah, AS; Saeed, AI; Elsayed, A; Bensaleh, MS; Obeid, AM; Alghofaili, A; Alzahem, I; Alshaibani, S; Alnahdi, M; Aljehani, N; Bhybha, A; Qasim, SM

Full Text link: https://t.ly/V2DD6

Date issued: 2017

Publisher: IEEE

Series Info: ntl Conf on Advanced Control Circuits Systems (ACCS) Systems & 2017 Intl Conf on New Paradigms in Electronics & Information Technology (PEIT);2017

Type: Other

Keywords: Micromechanical devices , Accelerometers , Robot sensing systems , Temperature sensors , Temperature measurement , Acceleration

Abstract:

An electronic interface system for MEMS accelerometer is implemented in 0.18μm HVCMOS technology. The ASIC uses 7.5/12.5V to increase the net actuation force and increases the input acceleration range. The measured ASIC sensitivity is 35fF/g. Maximum measured error is 0.38% of full scale, for 0 to 5g input acceleration. This ASIC interface includes on-chip reference generation, decimation, and temperature compensation.