Abstract:
In this work, a fast and cost-efficient method, to evaluate MEMS gyroscope, in a closed-loop sense-mode operation (force-feedback), is introduced. The solution proposed in this paper introduces a complete platform for developing MEMS-based closed-loop inertial sensor that is highly competitive in terms of performance and that can significantly reduce the development cost and the time-to-market. The platform comprises a high-performance highly-programmable digital capacitive ASIC used to interface to the MEMS sensor, along with hardware for digital processing. The platform is also associated with a software program to configure the ASIC settings according to the MEMS parameters, in order to achieve the desired dynamic range, bandwidth and noise performance. Sensor manufacturers can utilize this tool to quickly asses their sensors in the development phase. Furthermore, the ASIC associated with the platform can be used for rapid prototyping, or building a final sensor product.
