Abstract:
High-performance electro-static gyroscopes
require expensive vacuum-packaging, to maintain the high-Q
of the MEMS, and may require high actuation voltages. Piezo
sensors, on the other hand, do not suffer from these
shortcomings. In this work, the architecture and the
measurements results of a high-performance quartz gyro are
presented. The architecture of the gyroscope interface ASIC
adopts a mostly-digital implementation, where the drive-loop
processing, demodulation, and post-filtering are implemented
in the digital domain. Furthermore, the ASIC clock is based
on self-clocking scheme, where the gyro drive frequency drives
all internal clocks. The digital implementation, combined with
self-clocking, allows the read-out ASIC to interface to different
quartz-gyro sensing elements, with a wide range of drivefrequencies. The ASIC is tested with a tuning fork quartz gyro
sensing element. The complete gyro sensor module achieves a
±500 deg/s input range, and a noise-floor of 2.5 mdeg/s/√Hz.
