A self-clocked ASIC interface for MEMS gyroscope with 1m°/s/√Hz noise floor

Elsayed, A; Elshennawy, A; Elmallah, A; Shaban, Ahmad; George, B; Elmala, M; Ismail, A; Wassal, A; Sakr, M; Mokhtar, A; Hafez, M; Hamed, A; Saeed, M; Samir, M; Hammad, M; Elkhouly, M; Kamal, A; Rabieah, M; Elghufaili, A; Shaibani, S; Hakami, I; Alanazi, T

MSAR Home
→
MSA University Academic Research
→
Research Papers, Articles and Books Chapters.
→
Faculty Of Engineering Research Paper
→
View Item

A self-clocked ASIC interface for MEMS gyroscope with 1m°/s/√Hz noise floor

Elsayed, A; Elshennawy, A; Elmallah, A; Shaban, Ahmad; George, B; Elmala, M; Ismail, A; Wassal, A; Sakr, M; Mokhtar, A; Hafez, M; Hamed, A; Saeed, M; Samir, M; Hammad, M; Elkhouly, M; Kamal, A; Rabieah, M; Elghufaili, A; Shaibani, S; Hakami, I; Alanazi, T

Full Text link: https://t.ly/pwM0b

Date issued: 2011

Publisher: IEEE

Type: Other

Keywords: gyroscopes , Sigma delta modulation , Force feedback , Self-clocking , MEMS , Coriolis force

Abstract:

An interface for MEMS gyroscope is implemented in 0.18μm HVCMOS technology, and achieves a low noise floor of 1m°/sec/√Hz over 200Hz BW. Electromechanical ΣΔ force-feedback and self-clocking scheme based on gyro resonance are implemented. The interface includes on-chip reference generation, decimation, and temperature compensation.