Ismail, Ayman; Ashraf, Khaled; Metawe, Ahmed; Mostfa, Islam; Saeed, Ahmed; Helal, Eslam; Essawy, Mostafa; Abdelazim, Mohamed; Ibrahim, Mostafa; Raafat, Ramy; Abdelbary, Eslam; Alaa, Islam; Nabil, Marawan; Mansour, Abdelrahman; Ibrahim, Bassem; Elsayed, Ayman
(IEEE, 2015)
High-performance electro-static gyroscopes
require expensive vacuum-packaging, to maintain the high-Q
of the MEMS, and may require high actuation voltages. Piezo
sensors, on the other hand, do not suffer from these
shortcomings. ...