Ismail, AGeorge, BElmallah, AMokhtar, AAbdelazim, M.Elmala, MElshennawy, AOmar, ASaeed, MMostafa, IElsayed, A2020-03-072020-03-0720131. M. Lemkin, B. Boser, "A Three- Axis Micromachined Accelerometer with a CMOS Position-Sense Interface and Digital Offset- Trim Electronics", IEEE J. Solid-State Circuits, vol. 34, no. 4, pp. 456-468, Apr. 1999. Show Context View Article Full Text: PDF (563KB) Google Scholar 2. V. P. Petkov, B. Boser, "A Fourth-order Σ-Δ Interface for Micromachined Intertial sensors", IEEE J. Solid-State Circuits, vol. 40, no. 8, pp. 1602-1609, Aug. 2005. Show Context View Article Full Text: PDF (680KB) Google Scholar 3. X. Jiang, J. Seeger, M. Kraft, B. Boser, "A Monolithic Surface Micromachined Z-Axis Gyroscope with Digital Output", Dig. Symp. VLSI Circuits, pp. 16-19, June 2000. Show Context Google Scholar 4. A. Elsayed, A. Elshennawy, A. Elmallah, A. Shaban, B. George, M. Elmala, A. Ismail, A. Wassal, M. Sakr, A. Mokhtar, M. Hafez, A. Hamed, M. Saeed, M. Samir, M. Hammad, M. Elkhouly, A. Kamal, M. Rabieah, A. Elghufaili, S. Shaibani, I. Hakami, T. Alanazi, "A Self-Clocked ASIC Interface for MEMS Gyroscope with 1m°√Hz Noise Floor", Proc. IEEE Custom Integrated Circuits Conf. Dig. Tech. Papers, 2011. Show Context Google Scholar 5. V. P. Petkov, B. Boser, "High-order Electromichanical Σ-Δ Modulation in Micromachined Intertial sensors", IEEE Trans. Circuits Syst. I, vol. 53, no. 5, pp. 1016-1022, May 2006. Show Context View Article Full Text: PDF (517KB) Google Scholar 6. J. Raman, P. Rombouts, L. Weyten, "An Unconstrained Architecture for Systematic Design of Higher Order Σ-Δ Force Feedback Loops", IEEE Trans. Circuits Syst. I, vol. 55, no. 6, pp. 1601-1614, July 2008. Show Context View Article Full Text: PDF (1306KB) Google ScholarElectronic ISSN: 2164-1641Print ISSN: 2159-547Xhttps://doi.org/10.1109/Transducers.2013.6627319https://t.ly/b91VZMSA Google ScholarIn this work, the architecture, and measurements results of an ultra-low noise closed-loop force feedback gyroscope, with superior bias instability, are presented. The MEMS is interfaced to a highly programmable capacitive interface ASIC, constructing a complete sensor module with a digital-output. Measurements results indicate the superior performance of the gyroscope, with a bias instability of 1°/hr, a noise floor of 1.3m/s/√Hz, and a full-scale range of ±300°/s, while consuming 25mA from a 5V supply.enGyroscopesinertial sensorsClosed-loop sensorsforce-feedbackelectro-mechanical Σ-ΔOtherhttps://doi.org/10.1109/Transducers.2013.6627319