Ismail, AymanAshraf, KhaledMetawe, AhmedMostfa, IslamSaeed, AhmedHelal, EslamEssawy, MostafaAbdelazim, MohamedIbrahim, MostafaRaafat, RamyAbdelbary, EslamAlaa, IslamNabil, MarawanMansour, AbdelrahmanIbrahim, BassemElsayed, Ayman2020-03-082020-03-082015[1] Imran Ahmed et al., “A 3-axis PZT-based MEMS gyroscope in 0.18μm CMOS”, in Proc. IEEE European Solid State Circuits Conf. (ESSCIRC), Palais des Congres Bordeaux, France, Sep. 2012. [2] M. Saukoski, L. Aaltonen, and K. A. I. Halonen, “Zero-Rate Output and Quadrature Compensation in Vibratory MEMS Gyroscopes,” IEEE Sensors J., vol. 7, no. 12, pp.1639-1652, Dec. 2007. [3] A. Elsayed, A. Elshennawy, A. Elmallah, A. Shaban, B. George, M. Elmala, A. Ismail, A. Wassal, M. Sakr, A. Mokhtar, M. Hafez, A. Hamed, M. Saeed, M. Samir, M. Hammad, M. Elkhouly, A. Kamal, M. Rabieah, A. Elghufaili, S. Shaibani, I. Hakami, T. Alanazi, "A Self-Clocked ASIC Interface for MEMS Gyroscope with 1m°/s/√Hz Noise Floor," in Proc. IEEE Custom Integrated Circuits Conf. Dig. Tech. Papers, CA, USA, Sep. 2011. [4] V. P. Petkov, , and B. Boser, “A Fourth-order ΣΔ Interface for Micromachined Intertial sensors,” IEEE J. Solid-State Circuits, vol. 40, pp. 1602–1609, Aug. 2005. [5] A. Ismail, B. George, A. Elmallah, A. Mokhtar, M. Abdelazim , M. Elmala, A. Elshennawy, A. Omar, M. Saeed, I. Mostafa, A. Elsayed, "A high performance MEMS based digital-output gyroscope," in Proc. 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Barcelona, Spain, 2013.Electronic ISBN: 978-1-4799-8203-5https://doi.org/10.1109/ICSENS.2015.7370471https://t.ly/DGYvrMSA Google ScholarHigh-performance electro-static gyroscopes require expensive vacuum-packaging, to maintain the high-Q of the MEMS, and may require high actuation voltages. Piezo sensors, on the other hand, do not suffer from these shortcomings. In this work, the architecture and the measurements results of a high-performance quartz gyro are presented. The architecture of the gyroscope interface ASIC adopts a mostly-digital implementation, where the drive-loop processing, demodulation, and post-filtering are implemented in the digital domain. Furthermore, the ASIC clock is based on self-clocking scheme, where the gyro drive frequency drives all internal clocks. The digital implementation, combined with self-clocking, allows the read-out ASIC to interface to different quartz-gyro sensing elements, with a wide range of drivefrequencies. The ASIC is tested with a tuning fork quartz gyro sensing element. The complete gyro sensor module achieves a ±500 deg/s input range, and a noise-floor of 2.5 mdeg/s/√Hz.enInterface-ASICGyroscopePiezo-sensorQuartz-sensorOtherhttps://doi.org/10.1109/ICSENS.2015.7370471