Elmala, MAOmar, AMetawea, AIsmail, AElmallah, ASSaeed, AIElsayed, ABensaleh, MSObeid, AMAlghofaili, AAlzahem, IAlshaibani, SAlnahdi, MAljehani, NBhybha, AQasim, SM2020-03-092020-03-0920171. B. V. Amini et al., "A 2.5-V 14-bit ΔΣ CMOS SOI Capacitive Accelerometer", IEEE J. Solid-State Circuits, vol. 39, no. 12, pp. 2467-2476, Dec. 2004. Show Context View Article Full Text: PDF (1874KB) Google Scholar 2. B. V. Amini et al., "A 4.5-mW Closed-Loop ΔΣ Micro-Gravity CMOS SOI Accelerometer", IEEE J. Solid-State Circuits, vol. 41, no. 12, pp. 2983-2991, Dec. 2006. Show Context Google Scholar 3. A. Ismail et al., "A High Performance MEMS Based Digital-Output Gyroscope", Proc. Int. Conf. Solid-State Sensors Actuators and Microsystems, June 2013. Show Context Google Scholar 4. M. Ker et al., "Design of Charge Pump Circuit with Consideration of Gate-Oxide Reliability in Low-Voltage CMOS Process", IEEE J. Solid-State Circuits, vol. 41, no. 5, pp. 1100-1106, May 2006. Show Context View Article Full Text: PDF (1089KB) Google Scholar 5. A. Elsayed et al., "A Self-Clocked ASIC Interface for MEMS Gyroscope with 1 m°s/✓Hz Noise Floor", Proc. IEEE Custom Integrated Circuits Conf., Sept. 2011. Show Context Google Scholar 6. A. Omar et al., "A New Versatile Hardware Platform for Closed-Loop Gyro Evaluation", IEEE Inertial Sensors and Systems Symposium, pp. 1-14, Sept. 2015. Show Context Google ScholarElectronic ISBN: 978-1-5386-6407-0Print on Demand(PoD) ISBN: 978-1-5386-1878-3https://t.ly/V2DD6MSA Google ScholarAn electronic interface system for MEMS accelerometer is implemented in 0.18μm HVCMOS technology. The ASIC uses 7.5/12.5V to increase the net actuation force and increases the input acceleration range. The measured ASIC sensitivity is 35fF/g. Maximum measured error is 0.38% of full scale, for 0 to 5g input acceleration. This ASIC interface includes on-chip reference generation, decimation, and temperature compensation.enMicromechanical devicesAccelerometersRobot sensing systemsTemperature sensorsTemperature measurementAccelerationOther